SFC5500-0.5SLM

SFC5500-0.5SLM is a SFC5500 series digital mass flow controller. It represents the culmination of Sensirion’s excellent 20-year track record in precision control of gas flow. It is based on the microthermal measurement principle and makes use of Sensirion’s proven CMOSens® MEMS Technology. This allowed us to build a radical mass flow controller with best-in-class performance and excellent reliability, which unlike most other devices on the market, does not drift and does not require in-service re-calibration. Due to the exceptionally high control range enabled by the CMOSens® MEMS flow sensor, it can cover multiple flow ranges of a traditional mass flow controller in a single device. Coupled with multi-gas calibration and exchangeable fittings, it is the first mass flow controllers on the market available as standard off-the-shelf products suitable for applications in medical, analytical and industrial sectors.

• 0.5 to 0.0005slm flow range, 10mm Legis connector
• Excellent accuracy and repeatability, very wide control and measurement range
• G ¼″ flange compatible with a broad range of connectors: e.g. Swagelok, Legris, Festo
• Calibrated for multiple gases (air, N2, O2, H2, He, CH4, N2O, Ar, CO2)
• Digital interface with temperature-compensated output
• Ultra-fast settling time (<100ms) and accuracy of 0.08% FS or 0.8% SP
• Mean time between failures (MTBF) 169 years
• No drift and no re-calibration required in the field, NIST-traceable calibration
• Sub-D 9pin (male on device) electrical connector
• Supply voltage range from 14V to 26.4V